LCI manufactures the fastest and most efficient solar cell production IR furnaces are now available with user-selectable reducing atmosphere or standard nitrogen operation. High production yields and throughput are achievable due to the design's quick start-up and changeover time, offering precise and repeatable temperature profiles up to 1000°C in a uniform and ultra-clean process gas atmosphere.
Computer Controlled. The furnace is operated via ProControl software installed on a robust managed platform RAID1 furnace computer. The process engineer can easily vary process parameters using the sophisticated PID and power control parameters in the software. An almost infinite number of recipes and profiles can be labeled and stored for ready access on the furnace computer. The software includes 2 levels of password protected control (Engineer and Operator) and logs each change in recipe load or furnace state useful for troubleshooting product and process performance.
The furnace software operates on a Microsoft Windows 7 Professional computer system. The program and all settings and recipes are stored on the RAID1 dual mirrored redundant hard drives. The computer is complete with 17" LCD 1280x1024 high resolution color graphic screen, full size keyboard/mouse interface and both Ethernet and wirelesSCD-N high-speed network connections to facilitate view and control of the furnace by managers and process engineers from any location. The furnace includes four (4) local USB ports (two at entrance and two on the LCD monitor at the control panel) for connecting profilers and jump drive storage devices.
Low cost of ownership results from the furnace versatility, high throughput, quick readiness, and low utility consumption. Small zones and high temperature differentials enable broad profile flexibility. Profiles with peak temperatures from 150°C to 1000°C are possible. The furnace can be turned on, turned off, or re-profiled in minutes, saving time and money. These are the fastest and most efficient production furnaces available for semiconductor packaging. High production yields and through put are achievable due to the design's quick start-up and changeover time, precise and repeatable temperature profiles up to 1000°C. The process gas atmosphere is uniform and ultra-clean.
THERMAL PROCESSING | ||
Parameter | SCD-300 series | SCD-600 series |
---|---|---|
Load Station | 38 cm (15 inches) | 38 cm (15 inches) |
Entrance Isolation Baffle with Venturi Exhaust | 38 cm (15 inches) | 38 cm (15 inches) |
IR Heating Chamber, Dryer Zone 1 | 76 cm (30 inches) | 38 cm (15 inches) |
IR Heating Chamber, Dryer Zone 2 | 76 cm (30 inches) | 38 cm (15 inches) |
IR Heating Chamber, Dryer Zone 3 | none | 38 cm (15 inches) |
Exit Baffle/Dryer Exhaust | 38 cm (15 inches) | 38 cm (15 inches) |
Open Inspection Area | 38 cm (15 inches) | 38 cm (15 inches) |
Entrance Baffle/Furnace Exhaust | 38 cm (15 inches) | 38 cm (15 inches) |
IR Heating Chamber Furnace Zone 1 | 19 cm (7.5 inches) | 38 cm (15 inches) |
IR Heating Chamber Furnace Zone 2 | 19 cm (7.5 inches) | 38 cm (15 inches) |
IR Heating Chamber Furnace Zone 3 | 19 cm (7.5 inches) | 19 cm (7.5 inches) |
IR Heating Chamber Furnace Zone 4 | 19 cm (7.5 inches) | 19 cm (7.5 inches) |
IR Heating Chamber Furnace Zone 5 | none | 19 cm (7.5 inches) |
IR Heating Chamber Furnace Zone 6 | none | 19 cm (7.5 inches) |
Transition Tunnel with Venturi Exhaust | 13 cm (5 inches) | 38 cm (15 inches) |
Water Cooling Section 1 (CWWC) | 50 cm (20 inches) | 50 cm (20 inches) |
Water Cooling Section 2 | none | 50 cm (20 inches) |
Forced Air Cooling 1 | 115 cm (45 inches) | 115 cm (45 inches) |
Forced Air Cooling 2 | none | 115 cm (45 inches) |
Unload Station | 38 cm (15 inches) | 38 cm (15 inches) |
Total Furnace Length | 643 cm (253 inches) | 909 cm (358 inches) |
SPECIFICATIONS | ||
Parameter | SCD-300 | SCD-600 |
---|---|---|
Process Gas | CDA, Nitrogen, or Dual Gas with: 1. Nitrogen (-N) 2. Forming Gas Anneal | |
Dryer Control Zones | 2 zones | 2 zones |
Dryer Heating Chamber length | 71 cm (30 inches) | 152 cm (60 inches) |
Furnace Control Zones | 3 zones | 6 zones |
Furnace Heating Chamber length | 71 cm (30 inches) | 152 cm (60 inches) |
Cooling Chamber | 152-304 cm (60-120 inches), consisting of a mix of these modules, depending on application: 1. CACT – N2 convective and radiant cooling, exterior fan heat removal. 2. CAWC – N2 convective and radiant cooling, cold water heat removal (city or chiller). | |
Conveyor Belt | BNV- Niobium stabilized Nichrome V wire belt | |
Product Height | 19 mm (0.75 inches) above belt level stand-offs | |
Conveyor Height | 91 ±3.8 cm (36 ±1.5 inches) | |
Belt Size (model, width) | SCD-309 24 cm (9.5in) SCD-315, 38 cm (15in) SCD-324, 61 cm (24in) | SCD-609 24 cm (9.5in) SCD-615, 38 cm (15in) SCD-624, 61 cm (24in) |
Belt Speed | 5600 mm/min (220 ipm) | |
Exhaust | Improved venturi exhaust stacks to reduce process gas consumption. Number of stacks vary with process requirements. | |
Temperature Capacity, max | Dryer: 450°C; Furnace: 1000°C | |
Electrical | All models include universal transformers which accommodate 208-480 Vac and 50/60 Hz frequency anywhere in the world, allowing furnace relocation without external equipment. All furnace systems are phase balanced to improve facility efficiency. IR lamp controls automatically keep IR spectrum constant. | |
Peak Power Consumption kW | SCD-309: 59 kW SCD-315: 89 kW SCD-324: 149 kW | SCD-609: 90 kW SCD-615: 136 kW SCD-624: 229 kW |
Operating Power Consumption, kW | SCD-309: 23 kW SCD-315: 35 kW SCD-324: 59 kW | SCD-609: 36 kW SCD-615: 55 kW SCD-624: 92 kW |
Total Furnace Length | 643 cm (253 inches) | 909 cm (358 inches) |
Furnace Width | SCD-309 24 cm (9.5in) SCD-315, 38 cm (15in) SCD-324, 61 cm (24in) | SCD-609 24 cm (9.5in) SCD-615, 38 cm (15in) SCD-624, 61 cm (24in) |
Furnace Height | 172 cm (68 inches) | |
Net Weight | SCD-309:1280 kg (2800 Lb) SCD-315: 1450kg (3175 Lb) SCD-324: 1720kg (3800 Lb) | SCD-609:1800 kg (3950 Lb) SCD-615: 2040kg (4500 Lb) SCD-624: 2460kg (5400 Lb) |
Standard features are listed on the Standard Features pages (see link below). Popular options include the following:
POPULAR OPTIONS | |||||
Code | Description | Code | Description | Code | Description |
---|---|---|---|---|---|
EM | Element Monitors | LSE | Backlight Solar Cells for Automation | HSK | Upstream/Downstream Handshake |
EH | Edge Heaters | CX | Conveyor Extension, CXE15 & CXX15 | SMEMA | Product Handling |
LT | Process Ready Light Tower | UCD | Ultrasonic Cleaner Dryer | IR-E | Entrance Interface roller, small dia. |
OT | Overtemperature Monitor | CHIL | Chiller, Cooling System Recirc. | IR-X | Exit Interface roller, small diameter |