High Production with Fail-Safe Forming Gas Operation

LCI manufactures the fastest and most efficient solar cell production IR furnaces are now available with user-selectable reducing atmosphere or standard nitrogen operation. High production yields and throughput are achievable due to the design's quick start-up and changeover time, offering precise and repeatable temperature profiles up to 1000C in a uniform and ultra-clean process gas atmosphere.

Computer Controlled. The furnace is operated via ProControl software installed on a robust managed platform RAID1 furnace computer.  The process engineer can easily vary process parameters using the sophisticated PID and power control parameters in the software. An almost infinite number of recipes and profiles can be labeled and stored for ready access on the furnace computer.  The software includes 2 levels of password protected control (Engineer and Operator) and logs each change in recipe load or furnace state useful for troubleshooting product and process performance.

The furnace software operates on a Microsoft Windows 7 Professional computer system.  The program and all settings and recipes are stored on the RAID1 dual mirrored redundant hard drives.  The computer is complete with 17" LCD 1280x1024 high resolution color graphic screen, full size keyboard/mouse interface and both Ethernet and wirelesSCD-N high-speed network connections to facilitate view and control of the furnace by managers and process engineers from any location. The furnace includes four (4) local USB ports (two at entrance and two on the LCD monitor at the control panel) for connecting profilers and jump drive storage devices.

Low cost of ownership results from the furnace versatility, high throughput, quick readiness, and low utility consumption. Small zones and high temperature differentials enable broad profile flexibility. Profiles with peak temperatures from 150C to 1000C are possible. The furnace can be turned on, turned off, or re-profiled in minutes, saving time and money. These are the fastest and most efficient production furnaces available for semiconductor packaging. High production yields and through put are achievable due to the design's quick start-up and changeover time, precise and repeatable temperature profiles up to 1000C. The process gas atmosphere is uniform and ultra-clean.

Furnace Arrangement

THERMAL PROCESSING
ParameterSCD-300 seriesSCD-600 series
Load Station 38 cm (15 inches)38 cm (15 inches)
Entrance Isolation Baffle with Venturi Exhaust38 cm (15 inches)38 cm (15 inches)
IR Heating Chamber, Dryer Zone 176 cm (30 inches)38 cm (15 inches)
IR Heating Chamber, Dryer Zone 276 cm (30 inches)38 cm (15 inches)
IR Heating Chamber, Dryer Zone 3none38 cm (15 inches)
Exit Baffle/Dryer Exhaust38 cm (15 inches)38 cm (15 inches)
Open Inspection Area38 cm (15 inches)38 cm (15 inches)
Entrance Baffle/Furnace Exhaust38 cm (15 inches)38 cm (15 inches)
IR Heating Chamber Furnace Zone 119 cm (7.5 inches)38 cm (15 inches)
IR Heating Chamber Furnace Zone 219 cm (7.5 inches)38 cm (15 inches)
IR Heating Chamber Furnace Zone 319 cm (7.5 inches)19 cm (7.5 inches)
IR Heating Chamber Furnace Zone 419 cm (7.5 inches)19 cm (7.5 inches)
IR Heating Chamber Furnace Zone 5none19 cm (7.5 inches)
IR Heating Chamber Furnace Zone 6none19 cm (7.5 inches)
Transition Tunnel with Venturi Exhaust13 cm (5 inches)38 cm (15 inches)
Water Cooling Section 1 (CWWC)50 cm (20 inches)50 cm (20 inches)
Water Cooling Section 2none50 cm (20 inches)
Forced Air Cooling 1115 cm (45 inches)115 cm (45 inches)
Forced Air Cooling 2none115 cm (45 inches)
Unload Station38 cm (15 inches)38 cm (15 inches)
Total Furnace Length643 cm (253 inches)909 cm (358 inches)

IR Furnace CrosSCD-Section

Cross-section of SCD-609 Solar Cell Furnace with Dryer


Furnace Specifications for SCD Photovoltaic Models

SPECIFICATIONS
Parameter SCD-300 SCD-600
Process Gas CDA, Nitrogen, or Dual Gas with:
  1.  Nitrogen (-N)
  2.  Forming Gas Anneal
Dryer Control Zones2 zones 2 zones
Dryer Heating Chamber length71 cm (30 inches) 152 cm (60 inches)
Furnace Control Zones3 zones 6 zones
Furnace Heating Chamber length71 cm (30 inches) 152 cm (60 inches)
Cooling Chamber152-304 cm (60-120 inches), consisting of a mix of these modules, depending on application:
    1. CACT – N2 convective and radiant cooling, exterior fan heat removal.
    2. CAWC – N2 convective and radiant cooling, cold water heat removal (city or chiller).
Conveyor BeltBNV- Niobium stabilized Nichrome V wire belt
Product Height19 mm (0.75 inches) above belt level stand-offs
Conveyor Height91 3.8 cm (36 1.5 inches)
Belt Size (model, width) SCD-309 24 cm (9.5in)
SCD-315, 38 cm (15in)
SCD-324, 61 cm (24in)
SCD-609 24 cm (9.5in)
SCD-615, 38 cm (15in)
SCD-624, 61 cm (24in)
Belt Speed5600 mm/min (220 ipm)
Exhaust Improved venturi exhaust stacks to reduce process gas consumption.  Number of stacks vary with process requirements.
Temperature Capacity, max Dryer: 450C;  Furnace:  1000C
ElectricalAll models include universal transformers which accommodate 208-480 Vac and 50/60 Hz frequency anywhere in the world, allowing furnace relocation without external equipment. All furnace systems are phase balanced to improve facility efficiency. IR lamp controls automatically keep IR spectrum constant.
Peak Power Consumption kW SCD-309:  59 kW
SCD-315:  89 kW
SCD-324:  149 kW
SCD-609:  90 kW
SCD-615:  136 kW
SCD-624:  229 kW
Operating Power Consumption, kWSCD-309:  23 kW
SCD-315:  35 kW
SCD-324:  59 kW
SCD-609:  36 kW
SCD-615:  55 kW
SCD-624:  92 kW
Total Furnace Length643 cm (253 inches)909 cm (358 inches)
Furnace WidthSCD-309 24 cm (9.5in)
SCD-315, 38 cm (15in)
SCD-324, 61 cm (24in)
SCD-609 24 cm (9.5in)
SCD-615, 38 cm (15in)
SCD-624, 61 cm (24in)
Furnace Height172 cm (68 inches)
Net WeightSCD-309:1280 kg (2800 Lb)
SCD-315: 1450kg (3175 Lb)
SCD-324: 1720kg (3800 Lb)
SCD-609:1800 kg (3950 Lb)
SCD-615: 2040kg (4500 Lb)
SCD-624: 2460kg (5400 Lb)

Furnace Standard Features and Options

Standard features are listed on the Standard Features pages (see link below). Popular options include the following:

POPULAR OPTIONS
Code DescriptionCode DescriptionCode Description
EMElement MonitorsLSEBacklight Solar Cells for AutomationHSKUpstream/Downstream Handshake
EHEdge HeatersCXConveyor Extension, CXE15 & CXX15SMEMAProduct Handling
LTProcess Ready Light TowerUCDUltrasonic Cleaner DryerIR-EEntrance Interface roller, small dia.
OTOvertemperature MonitorCHILChiller, Cooling System Recirc.IR-XExit Interface roller, small diameter

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