High Production with Fail-Safe Hydrogen Operation

LCI manufactures the fastest and most efficient production IR furnaces, now  available with user-selectable reducing atmosphere or standard nitrogen operation. High production yields and throughput are achievable due to the design's quick start-up and changeover time, offering precise and repeatable temperature profiles up to 1000C in a uniform and ultra-clean process gas atmosphere.
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The S-Series hydrogen furnaces provide process gas atmospheres with hydrogen (H2) concentrations of more than 5% in a fail-safe operating environment. Using separate H2 and nitrogen (N2) gas inputs and built-in furnace controls, the user may mix custom concentrations of forming gas (H2/N2 mix) within the furnace, including varying the H2/N2 ratio along the length of the heating chamber.

Safeguards include N2 supplied to all curtains, eductors and cooling chamber, special H2 valve and controls enclosure with constant N2 purge, igniters on all exhaust stacks, combustible gas detectors at entrance, exit and within the controls enclosure, and N2 purge before and after H2 operation and in the event of any critical furnace alarm. A built-in heating chamber gas sampling system with trace oxygen analyzer monitors any potential oxygen contamination issues. All furnace detectors, including gas pressure and flow sensors, are integrated with the furnace ProControl software for emergency N2 purge and H2 shutoff in the event of an alarm.

Computer Controlled. The furnace is operated via ProControl software installed on a robust managed platform RAID1 furnace computer.  The process engineer can easily vary process parameters using the sophisticated PID and power control parameters in the software. An almost infinite number of recipes and profiles can be labeled and stored for ready access on the furnace computer.  The software includes 2 levels of password protected control (Engineer and Operator) and logs each change in recipe load or furnace state useful for troubleshooting product and process performance.

The furnace software operates on a Microsoft Windows 7 Professional computer system.  The program and all settings and recipes are stored on the RAID1 dual mirrored redundant hard drives.  The computer is complete with 17" LCD 1280x1024 high resolution color graphic screen, full size keyboard/mouse interface and both Ethernet and wireless-N high-speed network connections to facilitate view and control of the furnace by managers and process engineers from any location. The furnace includes four (4) local USB ports (two at entrance and two on the LCD monitor at the control panel) for connecting profilers and jump drive storage devices.

Low cost of ownership results from the furnace versatility, high throughput, quick readiness, and low utility consumption. Small zones and high temperature differentials enable broad profile flexibility. Profiles with peak temperatures from 150C to 1000C are possible. The furnace can be turned on, turned off, or re-profiled in minutes, saving time and money. These are the fastest and most efficient production furnaces available for semiconductor packaging. High production yields and through put are achievable due to the design's quick start-up and changeover time, precise and repeatable temperature profiles up to 1000C. The process gas atmosphere is uniform and ultra-clean.


IR Furnace Cross-Section

Furnace Specifications for Hydrogen Models

Parameter S-600HS-900HS-1200HS-1500HS-2400H
Process Gas Dual Mode:
  1.  Nitrogen (-N) Mode
  2.  Hydrogen Modes with Nitrogen/Hydrogen mixing (-HO/HNM)
Control Zones6 zones 6-7 zones 8-zones10-12 zones16 zones
Heating Chamber length152 cm (60 inches)230 cm (90 inches)304 cm (120 inches)380 cm (150 inches)609 cm (240 inches)
Cooling Chamber152-304 cm (60-120 inches), consisting of a mix of these modules, depending on application:
    1. CACT – N2 convective and radiant cooling, exterior fan heat removal.
    2. CAWC – N2 convective and radiant cooling, cold water heat removal (city or chiller).
Conveyor BeltBNV- low mass, stabilized Nichrome-V
Belt Size (model, width) S-609H 24 cm (9.5in)
S-615H, 38 cm (15in)
S-624H, 61 cm (24in)
S-909H 24 cm (9.5in)
S-915H, 38 cm (15in)
S-924H, 61 cm (24in)
S-1209H, 24 cm (9.5 in.)
S-1215H, 38 cm (15 in.)
S-1224H, 61 cm (24 in.)
S-1509H, 24 cm (9.5 in.)
S-1515H, 38 cm (15 in.)
S-1524H, 61 cm (24 in.)
S-2409H, 24 cm (9.5 in.)
S-2415H, 38 cm (15 in.)
S-2424H, 61 cm (24 in.)
Exhaust Improved venturi exhaust stacks to reduce process gas consumption.  Number of stacks vary with process requirements.
Temperature Capacity, max 600C (1000C with HT option)
ElectricalAll models include universal transformers which accommodate 208-480 Vac and 50/60 Hz frequency anywhere in the world, allowing furnace relocation without external equipment. All furnace systems are phase balanced to improve facility efficiency. IR lamp controls automatically keep IR spectrum constant.

Furnace Standard Features and Options

Standard features are listed on the Standard Features pages (see link below). Popular options include the following:

Code DescriptionCode DescriptionCode Description
EMElement MonitorsMAMoisture AnalyzerHSKUpstream/Downstream Handshake
MAMoistsure AnalyzerEHEdge HeatersSMEMAProduct Handling
LTProcess Ready Light TowerUCDUltrasonic Cleaner DryerIR-EEntrance Interface roller, small dia.
OTOvertemperature MonitorCHILChiller, Cooling System Recirc.IR-XExit Interface roller, small diameter

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