Define equipment-specific requirements prior purchase of a machine. This document will also serve as guide during machine buy-off and/or qualification.
2. Scope
This document is only applicable to the specific machine make and model as defined above. It only covers the technical, engineering, and quality requirements of Microchip MPHL2 for the said machine.
3. Design and Configuration Requirement
Below are the basic requirements associated with the physical and technical expectations from the machine. The details below are based on the actual capabilities of the machine that is operated by Microchip MPHL2.
Catagory
Item
Detail
Requirement
Vendor
Verified
Electrical/ Utilities
101
Power
480 Vac, 3 ph, 60 Hz Power: 46 kW, Current: 56 A
COMPLY. Nameplate corrected to 3 wire plus ground.
102
Water
Water Flow: 4 gpm nominal
Water Flow: 10 gpm max @ 65 psi -Recommend 20°C Inlet water temperature. -Recommend recirculated water system with chiller. Water system coolant should be suitable for use with aluminum and copper: DI or conditioned water with corrosion inhibitors or better. (by others)
103
Process Gas
Nitrogen, max supply
2800 SCFH Nitrogen (max, all flowmeters open) at 75 psi max
104
Hydrogen, max supply
480 SCFH Hydrogen (max, all flowmeters open) at 65 psi max
105
Pressure
65-75 psi
65-75 psi (see 102-104)
General
201
Profile capability
Runtime Duty Normal operation: 24 hr/day, 7 days/week
COMPLY. Large and small graphite load profiles run at 9 ipm for BonX and 5 ipm for Jum.
202
Access to internals
Motorized Chamber Lift
Standard MCL allows offline separation and raising of top half of furnace chamber for open access to lamps, internals and baffles for maintenance, repair and inspection. User controls Open/Close by wired pendent.
203
Clearance above conveyor belt
4 inches
COMPLY
Conveyor
301
Conveyor Belt Material or type
High temp NiChrome-V Compound Weave belt (without dimples or standoffs).
COMPLY
302
Belt width
10 inches
COMPLY
303
Belt speed range
0.5 to 10 ipm closed loop control by furnace program. Belt speed stored in each recipe.
COMPLY
304
Conveyor speed accuracy
+/- 0.5 % closed loop
COMPLY
305
Planarity
± 0.15 inch across whole belt, Measure actual
COMPLY. Top surface of belt is flat to less than 0.125" across width of belt.
306
Design Belt Speed
0.5-10 ipm
COMPLY
307
Belt loading
Belt Fully Loaded: 200 LB
COMPLY.
308
Belt Height above the floor
33.5-40 inches. (adjustable feet on furnace)
36"-40" with casters. With castors removed: 33.5" - 40"
309
Conveyor direction and height
Left to right
Left to Right (facing control console)
Safety
401
EMO button
Standard: 2 SEMI-compliant Emergency-Machine-Off buttons and entrance; 2 at exit.
COMPLY
402
Hot structures shall be covered for safety
Install ring guard or equivalent protector
Vendor to add plexiglass shields over high voltage component in drawers. Drawers can be locked for safety.
403
Signal Light Tower. Indicator lamp/tower lamp when H2 is ON or OFF
LT, 4-Stage light tower with H2.
Red-Alarm Amber-Warmup Green-Ready Blue-Hydrogen
404
Hazards
Safety signs
COMPLY. Warning labels applied to all hazard areas and drawers with electrical components. Drawers are lockable.
405
Power failure protection
UPS, circuit breakers and 3-phase disconnect are Specified Features.
UPS powers Computer, PLC and belt for approx 15 minutes during lapse in power. A 60 A 3-PH circuit breaker disconnect is installed on top of the furnace cabinet. Critical circuits are protected by circuit breakers.
406
Sealing clamps to outside of heating chamber to prevent H2 escape
Add to furnace
COMPLY
407
Ignitors on all exhaust stacks.
Add to furnace
(4) Dual Ignitors, one on each stack.
408
Combustible gas detectors installed on all at-risk points.
Add to furnace
Nova-Sensor Elite Model GC804: (1) at Entrance opening (1) at Flowmeter and Analyzer cabinet (1) at Exit opening
409
Gas collector installed at the entrance opening of the furnace above the belt.
The furnace was upgraded to an integral Gas Collector section with stack. It is now a part of the furnace chamber located before entrance baffle & stack.
410
Furnace software limits hydrogen operation until all safety and process provisions are met.
Add to furnace
COMPLY
Heat
501
Maximum Temperature
1000 °C, 4 zones
Design temperature is 1000C.
502
Operating temperature range
100-950°C
COMPLY
ADDLATER
503
Heated length
60 inches
min 60 inches heating length
504
Profile temp deviation
+/- 2 °C Temperature stratification (deviation across belt width): +/- 5 C.
ADDLATER
505
Element Monitor System (Lamp Failure Detection)
Add to furnace
COMPLY
506
Redundant OTP (Over Temperature Protection)
Add to furnace. Over temp scanner, independent redundant overtemperature system, include dual thermocouples
4-zone Scanner and redundant thermocouples on each zone.
Heat exchanger encloses sides, top and bottom, but water jackets are top and bottom only.
COMPLY
605
Closed atmosphere water-cooled tunnel.
COMPLY
606
Cooling Length: 60 inches
minimum 60 inches water cooling
607
Entrance and Exit muffle
With N2 gas curtain and should be Detachable
COMPLY. Entrance, Transition Tunnel & Exit Baffle are Top Removable. Entrance and Transition Tunnel internals can also be accessed when the Chamber is opened using MCL (item 202a). NOTE: VENDOR SHALL INSTALL BAFFLE PLATES WITHJ 1/8" CLEARANCE ON BOTTOM AND SIDES BEFORE UNTI SHIPS.
608
Exhaust System
Add to furnace
4 exhaust stacks with ignitors included. Supplier shall recommend cabinet and process gas exhaust hoods and duct sizes (all facility ductwork by others).
Heating
701
Heating zones
4 Zones, Top and bottom
COMPLY: 4 control zones, each with Top & Bottom heating elements.
702
Independent Zone temp control - Closed loop
Add to furnace
COMPLY. Each zone is controlled separately by integrated furnace software that sends signals to separate zone top and bottom PLC output modules that control zone lamp power. Process engineer can adjust zone gain, integral and %power to run process and/or store in recipe.
703
On screen profiling, 5 thermocouple ports
Add to furnace. Not included.
On-screen profiling-ready. Customer can install profiler software on furnace industrial rack-mounted computer. USB ports provided for connection of customer supplied profiling equipment.
Controlled Atmosphere
801
Nitrogen (N2) Flow Meter Range
Entr Exh 1 (Collector) Entrance Exhaust 2 Entr Baffle 1 (Collector) Entrance Baffle 2 Zone 1 Zone 2 Zone 3 Zone 4 Transition Baffle Transition Exhaust Cooling 1 Cooling 2 Plenums Top Plenums Bottom Exit Baffle Exit Exhaust
- Added 2 collector flowmeters; - added flowmeter to allow separate control of Plenum Top & Bot; - added cooling2 flowmeter for separate control of cooling sections.
802
Hydrogen (H2) Flow Meter Range
Zone 1 Zone 2 Zone 3 Zone 4
0-120 SCFH 0-120 SCFH 0-120 SCFH 0-120 SCFH
803
Water Flow Meters
Cooling 1 Top Cooling 2 Bottom
2 GPM (0-5 GPM) 2 GPM (0-5 GPM)
Conveyor, Other
901
Pitch, belt mesh
Updated belt pitch similar to belt on existing CU-610H - B-36-21-16: Balanced weave 36 openings/foot width 21 full spirals per foot length 16 gauge (.063") connecting rod 18 gauge (.047") spiral wire
902
Closed loop conveyor speed control
Provide
Standard
903
Conveyor tension adjust idle
Provide
The Transport System is low tension does not require high tension idler pinch roller. The idler roller is positioned at the slack side of the conveyor loop.
904
UPS / Battery back-up for conveyor belt, fans and control system
Add to furnace, 20 minutes during power outage
Tripp Lite SMX1500LCDT UPS provides 15 minutes of computer, PLC and belt operation after a power outage.
905
Speed control range
0.5 to 10 ipm (see item 303, 306).
COMPLY
Computer and Control System
1001
32 bit, Industrial Controller (PLC)
Add to furnace
COMPLY
1002
Windows OS version
Windows 7
COMPLY
1003
17” LCD Color monitor, touch screen option no cost?
Standard 17” monitor with keyboard/mouse control.
COMPLY
1004
Automatic start-up and shut-down
Provide
Startup sequence is automated, but must be initiated by operator. All permissions must be satisfied before H2 operation can start. Emergency shutdown can be initiated by operator or automatically by system alarm
1005
Profile storage > 200
Provide
500GB drive allows 360GB available for data. Recipe files are approx 4kB (<90 million recipes).
1006
Power & conveyor system information shall be displayed on PC monitor
Provide
Belt speed, zone temperature and percent power displayed on Process Screen.
1007
Remote control of machine Via modem and via Internet.
Furnace Computer System CAN be connected to the internet for factory remote troubleshooting and operation as necessary. However, continuous connection to network and/or internet is NOT recommended. Automatic updates and virus intrusions can put production performance and stability at risk.
1008
- HSMS, SECS II, GEM - Please refer to General Requirement Specification for CIM Requirement
N/A
Not offered.
n/a
Others / Specified Features
1101
System leveling capability
+/-20 mm
+/-1 inch
1102
Hydrogen Operation including Dual Gas operation. N2/H2 Mixing: H2 Detect, Ignitors, Inlet Collector hood and Exit Baffle stack, 60" Closed Atmosphere Water Cooling, 30” Extended Entrance Baffle.
Add to furnace
COMPLY
1103
Oxygen Analyzer and OSS online 4-port gas sampling system
Add to furnace
COMPLY
1104
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-
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1105
- Software back-up CD/HDD - Required documents at General Requirement Spec
Backup CD with furnace software; Documentation includes web-based instruction manual
COMPLY
1106
Initial Spare Parts
1 year spare parts included.
COMPLY
1107
Refer to Equipment manual and supplier’s Product/Equipment specification (201831A) for details.
